Scalable CMOS back-end-of-line-compatible AlScN/two-dimensional channel ferroelectric field-effect transistors

Authors: Kwan-Ho Kim, Seyong Oh, Merrilyn Mercy Adzo Fiagbenu, Jeffrey Zheng, Pariasadat Musavigharavi, Pawan Kumar, Nicholas Trainor, Areej Aljarb, Yi Wan, Hyong Min Kim, Keshava Katti, Seunguk Song, Gwangwoo Kim, Zichen Tang, Jui-Han Fu, Mariam Hakami, Vincent Tung, Joan M. Redwing, Eric A. Stach, Roy H. Olsson, Deep Jariwala

Published: 2023-05-22

DOI: 10.1038/s41565-023-01399-y

Source: Full article

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Abstract

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