Super-stealth dicing of transparent solids with nanometric precision

Authors: Zhen-Ze Li, Hua Fan, Lei Wang, Xu Zhang, Xin-Jing Zhao, Yan-Hao Yu, Yi-Shi Xu, Yi Wang, Xiao-Jie Wang, Saulius Juodkazis, Qi-Dai Chen, Hong-Bo Sun

Published: 2024-05-08

DOI: 10.1038/s41566-024-01437-8

Source: Full article


Abstract

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