A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials

Authors: Yang Shen, Zhejia Zhang, Zhujun Yao, Mengge Jin, Jintian Gao, Yuhan Zhao, Wenzhong Bao, Yabin Sun, He Tian

Published: 2025-03-18

DOI: 10.1007/s40820-025-01702-7

Source: Full article


Abstract

Abstract