Monolithic and heterogeneous three-dimensional integration of two-dimensional materials with high-density vias

Authors: Subir Ghosh, Yikai Zheng, Zhiyu Zhang, Yongwen Sun, Thomas F. Schranghamer, Najam U Sakib, Aaryan Oberoi, Chen Chen, Joan M. Redwing, Yang Yang, Saptarshi Das

Published: 2024-10-09

DOI: 10.1038/s41928-024-01251-8

Source: Full article

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Abstract

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