Composition-Controlled Atomic Layer Deposition of Phase-Change Memories and Ovonic Threshold Switches with High Performance

Authors: Valerio Adinolfi, Lanxia Cheng, Mario Laudato, Ryan C. Clarke, Vijay K. Narasimhan, Simone Balatti, Son Hoang, Karl A. Littau

Published: 2019-09-04

DOI: 10.1021/acsnano.9b04233

Source: Full article

---

Abstract

No abstract found.