Nanometer-Scale Heterogeneous Interfacial Sapphire Wafer Bonding for Enabling Plasmonic-Enhanced Nanofluidic Mid-Infrared Spectroscopy
Authors: Jikai Xu, Zhihao Ren, Bowei Dong, Xinmiao Liu, Chenxi Wang, Yanhong Tian, Chengkuo Lee
Published: 2020-08-19
DOI:
10.1021/acsnano.0c05794
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