Microspheres give improved resolution in nondestructive examination of semiconductor devices

Authors: R. C. Woods

Published: 2022-03-16

DOI: 10.1038/s41377-022-00747-2

Source: Full article

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Abstract

AbstractThe minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et al. show in a new Light: Science and Applications article that using an additional glass microsphere in the optical path can improve the resolution significantly.