Coherent X-ray Spectroscopy Elucidates Nanoscale Dynamics of Plasma-Enhanced Thin-Film Growth

Authors: Peco Myint, Jeffrey M. Woodward, Chenyu Wang, Xiaozhi Zhang, Lutz Wiegart, Andrei Fluerasu, Randall L. Headrick, Charles R. Eddy, Karl F. Ludwig

Published: 2024-01-09

DOI: 10.1021/acsnano.3c07619

Source: Full article

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Abstract

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