Crafting chirality in three dimensions via a novel fabrication technique for bound states in the continuum metasurfaces

Authors: Zaid Haddadin, Anna My Nguyen, Lisa V. Poulikakos

Published: 2024-02-05

DOI: 10.1038/s41377-023-01368-z

Source: Full article

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Abstract

AbstractAn additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces, which is essential for the geometric design of intrinsically chiral structures.