Multistate, Ultrathin, Back-End-of-Line-Compatible AlScN Ferroelectric Diodes

Authors: Kwan-Ho Kim, Zirun Han, Yinuo Zhang, Pariasadat Musavigharavi, Jeffrey Zheng, Dhiren K. Pradhan, Eric A. Stach, Roy H. Olsson, Deep Jariwala

Published: 2024-06-03

DOI: 10.1021/acsnano.4c03541

Source: Full article

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Abstract

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