Ultrahigh dielectric permittivity in Hf0.5Zr0.5O2 thin-film capacitors

Authors: Wen Di Zhang, Zi Zheng Song, Shu Qi Tang, Jin Chen Wei, Yan Cheng, Bing Li, Shi You Chen, Zi Bin Chen, An Quan Jiang

Published: 2025-03-18

DOI: 10.1038/s41467-025-57963-8

Source: Full article


Abstract

No abstract found.