Atomic surface of diamond induced by novel green photocatalytic chemical mechanical polishing with high material removal rate

Authors: Zhibin Yu, Zhenyu Zhang, Zinuo Zeng, Cheng Fan, Yang Gu, Chunjing Shi, Hongxiu Zhou, Fanning Meng, Junyuan Feng

Published: 2024-12-12

DOI: 10.1088/2631-7990/ad97f7

Source: Full article