Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages

Authors: Fazhi Song, Ning Cui, Shuaiqi Chen, Kai Zhang, Yang Liu, Xinkai Chen, Jiubin Tan

Published: 2024-11-12

DOI: 10.1109/jas.2024.124968

Source: Full article

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Abstract

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