Dynamic piezoelectric MEMS-based optical metasurfaces

Authors: Chao Meng, Paul C. V. Thrane, Fei Ding, Jo Gjessing, Martin Thomaschewski, Cuo Wu, Christopher Dirdal, Sergey I. Bozhevolnyi

Published: 2021-06-23

DOI: 10.1126/sciadv.abg5639

Source: Full article

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Abstract

Combining piezoelectric MEMS with optical gap-plasmon metasurfaces enables electrically driven dynamic 2D wavefront shaping.